JPS6228872U - - Google Patents

Info

Publication number
JPS6228872U
JPS6228872U JP11846785U JP11846785U JPS6228872U JP S6228872 U JPS6228872 U JP S6228872U JP 11846785 U JP11846785 U JP 11846785U JP 11846785 U JP11846785 U JP 11846785U JP S6228872 U JPS6228872 U JP S6228872U
Authority
JP
Japan
Prior art keywords
chamber
heater
cvd apparatus
substrate
transmission window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11846785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11846785U priority Critical patent/JPS6228872U/ja
Publication of JPS6228872U publication Critical patent/JPS6228872U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP11846785U 1985-07-31 1985-07-31 Pending JPS6228872U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11846785U JPS6228872U (en]) 1985-07-31 1985-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11846785U JPS6228872U (en]) 1985-07-31 1985-07-31

Publications (1)

Publication Number Publication Date
JPS6228872U true JPS6228872U (en]) 1987-02-21

Family

ID=31004945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11846785U Pending JPS6228872U (en]) 1985-07-31 1985-07-31

Country Status (1)

Country Link
JP (1) JPS6228872U (en])

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